Thin film tuning-fork type inflection resonator and electric signal processing element
US8102102B2 · kind B2 · utility
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3References
5Claims
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Key dates
| Filing date | Feb 28, 2011 |
| Grant date | Jan 24, 2012 |
| Priority date | — |
| Expiry date | Feb 28, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/026
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.