Spectrometer with a slit for incident light and fabrication of the slit

US8102526B2 · kind B2 · utility

Assignee

• Carl Zeiss Micromanaging GmbH · DE

Inventors

• Jens Hofmann · Mannheim, DE
• Nico Correns · Weimar, DE
• Lutz Freytag · Jena, DE
• Felix Kerstan · Jena, DE
• Doris Jochmann · Jena, DE
• Carsten Ziener · Jena, DE
• Gerhard Foerschler · Pforzheim, DE

Key dates

• Filing date: Sep 24, 2008
• Grant date: Jan 24, 2012
• Expiry date: Jan 14, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/18
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A spectrometer including an entrance slit and the production of the entrance slit. The spectrometer includes a housing, an entrance slit, and an imaging diffraction grating inside the housing for splitting and imaging the light onto an optoelectric detector. The detector is arranged inside the housing. The housing and the base plate are connected to each other by mutually cooperating positioning members. The entrance slit, the positioning members of the base plate and the holding members for receiving and mounting the detecting device are integral parts of the base plate and are produced from the base plate in a precise manner, in a suitable form and in defined mutual positions by, for example, laser cutting or liquid jet cutting. The positioning members of the base plate and/or the holding members for the detecting device can be provided as resilient elements.