Control techniques for electrostatic microelectromechanical (MEM) structure
US8102637B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2009 |
| Grant date | Jan 24, 2012 |
| Priority date | — |
| Expiry date | Nov 6, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H47/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are a method, device, and system for a microelectromechanical (MEM) device control system that can control the operation of a MEM device. The system can include a microelectromechanical device and a control circuit. The micromechanical device can include a moveable member coupled to an electrical terminal, a sensor, responsive to a movement of the moveable member, can output a sensor signal based on the movement of the moveable member, and an actuating electrode for receiving a control signal. The control circuit can be responsive to the signals output by the sensor and outputs the control signal to the actuating electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.