Capacitive pressure sensor

US8104353B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Ulfert Drewes · Bad Hersfeld, DE
• Frank Hegner · Bad Kötzting, DE
• Andreas Rossberg · Bad Säckingen, DE
• Elke Schmidt · Bad Säckingen, DE
• Sabine Stolle · Dresden, DE
• Christel Kretschmar
• Melanie Hentsche · Dresden, DE

Key dates

• Filing date: Jun 4, 2008
• Grant date: Jan 31, 2012
• Expiry date: Sep 29, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49117
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.