Process for producing monosilane

US8105564B2 · kind B2 · utility

Assignee

• EVONIK DEGUSSA GMBH · DE

Inventors

• Raymund Sonnenschein · Frankfurt, DE
• Peter Adler · Los Angeles, US
• Yuriy Kasatkin · Kashkhatau, RU
• Adolf Petrik · Freudenstadt, DE
• Leonid Schwarzmann · Bilhorod-Dnistrovskyi, UA

Key dates

• Filing date: Jun 19, 2006
• Grant date: Jan 31, 2012
• Expiry date: Apr 26, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S203/06
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Provided is a plant for the continuous production of monosilane and tetrachlorosilane by catalytic dismutation of trichlorosilane, wherein the plant contains: a countercurrent reactor having a double wall, a catalyst bed containing a catalyst which is located in the countercurrent reactor, a condenser at the top of the countercurrent reactor, a vaporizer unit at the bottom of the countercurrent reactor, a trichlorosilane feed line for the introduction of trichlorosilane into the countercurrent reactor, a heat exchanger, with the trichlorosilane conveyed by line via the heat exchanger and preheated there by a bottom product from the vaporizer unit and, for this purpose, the bottom product is fed by line via the heat exchanger into the double wall at a level in the lower part of the countercurrent reactor and discharged from the double wall at a level in the upper part of the countercurrent reactor, a condensation unit downstream of the condenser, and a distillation column having an outlet for monosilane.