Laser processing of conductive links
US8106329B2 · kind B2 · utility
4Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 2008 |
| Grant date | Jan 31, 2012 |
| Priority date | — |
| Expiry date | Dec 1, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser system for processing conductive link structures includes a seed laser generating a seed laser beam. The seed laser is sliced by a modulator into a user configurable series of pulses and the pulses are optically amplified and applied to a conductive link structure. Preferably, the bandwidth of the seed laser is less than 1 nm with an IR center frequency, and the frequency of the laser light of the pulses is doubled or quadrupled prior to application to the conductive structure. Preferably, the pulses are about 1-18 second pulsewidth and are separated by 100-400 ns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.