Vision alignment with multiple cameras and common coordinate at contactor for IC device testing handlers
US8106349B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2008 |
| Grant date | Jan 31, 2012 |
| Priority date | — |
| Expiry date | Apr 29, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06794
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for aligning a device with a contactor is provided. The apparatus includes a pick and place device, for transporting the device. A first camera acquires an image of the device relative to device holder fiducials of the pick and place device. A second camera detects the location of the contactor relative to fiducials positioned on an alignment frame plate. A third camera to image frame and device holder fiducials to correlate the first and second camera coordinates. Given a processor determines the alignment difference between the device and the contactor. A plurality of actuators align the device with the contactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.