Patent · US Active

Mass spectrometer arrangement

US8106354B2 · kind B2 · utility

7Cited by

4References

7Claims

0Family size

Assignee

OERLIKON LEYBOLD VACCUM GMBH · DE

Inventors

Markus Henry · Cologne, DE
Christian Beyer · Freiberg, DE

Key dates

Filing date	Jun 3, 2008
Grant date	Jan 31, 2012
Priority date	—
Expiry date	Oct 13, 2028

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D29/522
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.