Method for manufacturing integrated circuit inductors having slotted magnetic material
US8108984B2 · kind B2 · utility
27Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2009 |
| Grant date | Feb 7, 2012 |
| Priority date | — |
| Expiry date | Nov 19, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49165
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods of manufacture of integrated circuit inductors having slotted magnetic material will be described. The methods may employ electro- or electroless plating techniques to form a layer or layers of magnetic material within the slotted magnetic material structure, and in particular those magnetic material layers adjacent to insulator layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.