Fluid temperature control device
US8109328B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 14, 2008 |
| Grant date | Feb 7, 2012 |
| Priority date | — |
| Expiry date | May 10, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B2400/01
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A fluid temperature control device, which is particularly suitably applied to the temperature control of a processing liquid in a semiconductor device manufacturing process, capable of performing quickly and precisely the temperature control of a temperature-controlled fluid, and the device can also be made as small as possible. This fluid temperature control device includes a body block having flow passage grooves formed therein; heat transfer plates which are disposed on surfaces of the body block to form flow passages where a temperature-controlled fluid flows; heaters which heat the temperature-controlled fluid flowing through the flow passages via at least one of the heat transfer plates; and thermoelectric modules which heat and cool the temperature-controlled fluid flowing through the flow passages via at least one of the heat transfer plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.