Micromechanical resonating devices and related methods
US8111108B2 · kind B2 · utility
2Cited by
55References
32Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 29, 2008 |
| Grant date | Feb 7, 2012 |
| Priority date | — |
| Expiry date | Dec 7, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.