Process and method for a decoupled multi-parameter run-to-run controller

US8112168B2 · kind B2 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Madhu Ramavajjala · Austin, US
• Kristi Bushman · Richardson, US
• Robert Ray Spangler · Wylie, US
• Stephen Arlon Meinser · Allen, US
• Ronald Charles Roth · McKinney, US

Key dates

• Filing date: Jul 29, 2009
• Grant date: Feb 7, 2012
• Expiry date: Aug 26, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.