Radio frequency tunable capacitors and method of manufacturing using a sacrificial carrier substrate
US8112852B2 · kind B2 · utility
7Cited by
31References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2008 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Sep 4, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/435
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An embodiment of the present invention provides a method, comprising manufacturing capacitors by creating a wafer using a substrate as a sacrificial carrier for the construction of said capacitor; and removing said sacrificial carrier wafer once said capacitor processing is complete.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.