Units for collecting particles, apparatus including the same and methods for collecting particles using the same
US8114203B2 · kind B2 · utility
2Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2008 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Dec 16, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A collection unit includes an exhaust conduit providing a path through which a process gas flows, a trap installed in the exhaust conduit, and a collection line connected to the trap. The trap has an inlet through which particles in the process are introduced into the trap, and the collection line penetrates a portion of the exhaust conduit to extend toward an outside region of the exhaust conduit. An apparatus including the collection unit and a method for collecting particles using the same are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.