High-pressure fluidized bed reactor for preparing granular polycrystalline silicon
US8114352B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2009 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Apr 23, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2208/00407
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.