Container and exposure apparatus having the same
US8115907B2 · kind B2 · utility
0Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2009 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Apr 27, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming a container having a lid and a container body which define an inside space, and a material containing an organic compound provided in the inside space. The method includes forming a groove and a communication member for communicating the groove with an outside space, in at least one of the lid and the container body, providing the material in the inside space, welding the lid and the container body to each other, and exhausting the organic compound vaporized by welding heat to the outside space through the groove and the communication member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.