Vibrating beam accelerometer with improved performance in vibration environments
US8117917B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2008 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Jul 8, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/097
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having at least two opposing interior walls, and one or more flexures for flexibly connecting the proof mass at a first end to a first one of the opposing walls of the housing. A first resonator is connected to a first surface of the proof mass at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator is connected to a second surface of the proof mass and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.