Germane purification
US8118913B2 · kind B2 · utility
0Cited by
9References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 16, 2009 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Mar 10, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2220/56
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process and system for the purification of germane containing phosphine to provide a purified germane product. One aspect of the present invention is a process for making a purified germane product containing less than 50 ppb of phosphine which comprises providing a phosphine contaminated germane gas hydrogen gas mixture; passing the germane gas hydrogen gas mixture through an adsorbent which selectively adsorbs phosphine and withdrawing therefrom a purified germane gas hydrogen mixture; and separating the purified germane gas from the hydrogen germane gas mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.