Method for manufacturing electronic device
US8119020B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2007 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Mar 2, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient relative humidity outside the closed-type transport container on a particular interprocess transport path in which an intermediate product stored in the closed-type transport container is transported from a first manufacturing process to a second manufacturing process. The first manufacturing process allows basic compounds containing nitrogen atoms to be released from the intermediate product. The second manufacturing process is susceptible to degradation due to contamination by the basic compounds.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.