Acoustic wave device
US8120230B2 · kind B2 · utility
4Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2010 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Jun 11, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/0019
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes an acoustic wave element including an IDT electrode provided on a substrate, and a protective film arranged to cover the acoustic wave element so as to stabilize characteristics. The protective film is a silicon nitride film composed of silicon and nitrogen as main components and when a composition ratio of the silicon to the nitrogen is represented by 1:X, X is about 1.15 or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.