Process and system for providing acetylene

US8129577B2 · kind B2 · utility

Assignee

• AIR PRODUCTS AND CHEMICALS, INC. · US

Inventors

• Timothy John Maykut · Bethlehem, US
• Suhas Narayan Ketkar · Allentown, US
• Benjamin James Arthur Inman · Basingstoke, GB
• John Irven · Stansted, GB
• Eugene Joseph Karwacki, Jr. · Orefield, US
• Neil Alexander Downie · Odiham, GB

Key dates

• Filing date: Sep 4, 2009
• Grant date: Mar 6, 2012
• Expiry date: Jul 13, 2030

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C07C7/09
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.