Probe card assembly with carbon nanotube probes having a spring mechanism therein
US8130007B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2007 |
| Grant date | Mar 6, 2012 |
| Priority date | — |
| Expiry date | Mar 14, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49204
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.