Calibration of a spatial light modulator
US8130374B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 26, 2011 |
| Grant date | Mar 6, 2012 |
| Priority date | — |
| Expiry date | Sep 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/0437
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for calibrating a spatial light modulator comprising an array of channels includes selecting a plurality of channel sets; operating each of the channel sets to provide corresponding output radiation; providing a detector for measuring the output radiation; determining a plurality of intensity values, each representing an intensity of the output radiation provided by a different one of the channel sets; providing a correction factor for each of the channels sets, wherein each correction factor remains constant during a subsequent recalibration of the spatial light modulator; modifying each determined intensity value in accordance with a corresponding one of the correction factors; determining a difference between one of the modified intensity values and a target intensity value; and reducing the determined difference by adjusting a control level of at least one channel in the channel set corresponding to the one of the modified intensity values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.