Method of evaluating a film
US8131492B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Dec 26, 2007 |
| Grant date | Mar 6, 2012 |
| Priority date | — |
| Expiry date | Apr 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N7/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.