Method for controlling or regulating a vacuum valve
US8132782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2010 |
| Grant date | Mar 13, 2012 |
| Priority date | — |
| Expiry date | May 31, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0396
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.