Chemical liquid supplying apparatus and pump assembly
US8133042B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2008 |
| Grant date | Mar 13, 2012 |
| Priority date | — |
| Expiry date | Sep 11, 2030 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B43/084
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A chemical liquid supplying apparatus, which can discharge chemical liquid with high precision, is provided. A pump assembly is detachably mounted in a pump case in which liquid inflow and discharge ports are formed. The pump assembly includes: a cylindrical body in which a piston is slidably incorporated axially; an elastically deformable bellows forming a pump chamber in the pump case and forming a drive chamber in which an indirect medium is enclosed; and an axially elastically-deformable bellows cover continuing with a sliding surface of the piston and forming a seal chamber in which the indirect medium is enclosed, and the pump assembly is unitized. The pump assembly is coupled to a drive shaft via a connecting member, and by axial-directional reciprocating movement of this drive shaft, the piston causes the bellows to perform a pump operation, whereby the chemical liquid is discharged from a liquid discharge portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.