Patent · US Active

Mass spectrometer

US8134120B2 · kind B2 · utility

1Cited by

8References

17Claims

0Family size

Assignee

BAYER TECHNOLOGY SERVICES GMBH · DE

Inventors

Joerg Mueller · Bonn, DE
Eric Wapelhorst · Bremen, DE
Jan-Peter Hauschild · Eindhoven, NL

Key dates

Filing date	Feb 19, 2008
Grant date	Mar 13, 2012
Priority date	—
Expiry date	Sep 24, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01J49/482
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A mass spectrometer with an ionization chamber with a feed channel for a gas to be examined, including an electron source (d, n) for ionizing the gas to be examined, electrodes (c) for accelerating the ionizing electrons, electrodes (g, h, j, m) for the mass-dependent separation of the ions by acceleration/deceleration thereof, a detector (l) for the separated ions, a wiring with metallic conductors. The components are arranged on a plane nonconductive substrate (1), having an energy filter (k) for the ions, the energy filter being embodied as a 90° sector, is constructed in completely planar fashion. The ionization chamber (b), the electrodes (g, h, j, m) for accelerating the electrons and ions, the detector (l) for the ions and the energy filter (k) are produced by a single step of photolithography and etching of a doped semiconductor die (6) applied to the substrate (1) and the wiring (2) and the abovementioned parts are covered by a second flat nonconductive substrate (7).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.