Patent · US Active

Ion source with corner cathode

US8134130B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 19, 2010
Grant dateMar 13, 2012
Priority date
Expiry dateOct 15, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J49/0013
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed adjacent the base of the V-shaped groove. The third electrode may be an anode that defines an enclosed volume with an aperture formed therein adjacent the electron emitter filament. A potential of the first electrode may be less than a potential of the second electrode, and the potential of the second electrode may be less than a potential of the third electrode. A fourth electrode that is disposed between the electron emitter filament and the anode may be used to produce a more collimated electron beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.