Micromechanical sensor, sensor array and method
US8136403B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 4, 2006 |
| Grant date | Mar 20, 2012 |
| Priority date | — |
| Expiry date | Mar 4, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a micromechanical sensor for analyzing liquid samples and an array of such sensors. The invention also concerns a method for sensing liquid samples and the use of longitudinal bulk acoustic waves for analyzing liquid phase samples micromechanically. The sensor comprises a body and a planar wave guide portion spaced from the body. At least one electro-mechanical transducer element are used for excitation of longitudinal bulk acoustic waves to the wave guide portion in response to electrical actuation and for converting acoustic waves into electrical signals. The wave guide portion is provided with a sample-receiving zone onto which the sample can be introduced. By means of the invention, the sensitivity of micromechanical liquid sensors can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.