Patent · US Active

Sluice system for a vacuum facility

US8136549B2 · kind B2 · utility

1Cited by

10References

3Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Olaf Gawer · Dresden, DE
Jens Melcher · Dresden, DE
Dietmar Schulze · Kandern, DE
Hans Hecht · Stuttgart, DE

Key dates

Filing date	Apr 2, 2010
Grant date	Mar 20, 2012
Priority date	—
Expiry date	Apr 2, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/86131
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A sluice system for a vacuum coating facility for coating substrates that can be moved through the vacuum coating in a direction of conveyance comprises a prevacuum slice chamber and a transfer chamber adjoining a coating chamber, wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber is directly adjacent to the transfer chamber and the fine vacuum can be regulated in the prevacuum sluice chamber. A high-vacuum pump system can also alternatively and selectively be connected to the prevacuum sluice chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.