Zinc oxide thin film, transparent conductive film and display device using the same
US8137594B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2008 |
| Grant date | Mar 20, 2012 |
| Priority date | — |
| Expiry date | Oct 22, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/926
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A zinc oxide thin film having desired crystallinity is fabricated. The present invention provides a zinc oxide thin film which laminated on a substrate, and which is a crystalline thin film of a wurtzite form. The c-axis of the crystalline thin film is oriented in a direction substantially perpendicular to the substrate. A zinc surface of being one polar surface of the crystalline thin film in the c-axis direction is formed in the uppermost layer. In addition, the invention also provides a zinc oxide thin film which is laminated on a substrate, and which is a crystalline thin film of a wurtzite form. The zinc oxide thin film is formed on a metal thin film layer by a thin film fabricating technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.