Digital micromirror device having wavelength-dependent modulation structure and method of manufacturing the same
US8139284B2 · kind B2 · utility
1Cited by
6References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 2008 |
| Grant date | Mar 20, 2012 |
| Priority date | — |
| Expiry date | Mar 4, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3516
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A digital micromirror device (DMD), a method of manufacturing the DMD and an optical processor incorporating a DMD. In one embodiment, the DMD includes: (1) a first group of micromirrors having a first modulation structure based on a first wavelength of light and a second group of micromirrors having a second modulation structure based on a second wavelength of light, the second wavelength differing from the first wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.