Pick-and-place apparatus
US8141922B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2007 |
| Grant date | Mar 27, 2012 |
| Priority date | — |
| Expiry date | Oct 8, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pick-and-place apparatus for transferring and loading semiconductor devices between first and second loading elements is provided. The pick-and-place apparatus includes a multiplicity of picking unit modules, each of which has at least one or more picking units, and an interval regulation apparatus for regulating intervals between the picking unit modules at the first to third modes. The first to third row interval values are different from each other. The intervals between the picking unit modules are all regulated to be identical to the first row interval at the first mode, are alternately regulated to the second row interval and the third row interval in turn at the second mode, and are alternately regulated to the third row interval and the second row interval in turn at the third mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.