Patent · US Active

Aqueous developable benzocyclobutene-based polymer composition and method of use of such compositions

US8143360B2 · kind B2 · utility

2Cited by
14References
17Claims
0Family size

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Inventors

Key dates

Filing dateOct 12, 2005
Grant dateMar 27, 2012
Priority date
Expiry dateJan 23, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/075
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The invention is a composition comprising a curable arylcyclobutene based oligomer or polymer and a dissolution inhibitor which comprises a compound comprising at least two diazonaphthoquinone (DNQ) moieties each of which is pendant from different phenyl groups.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.