Aqueous developable benzocyclobutene-based polymer composition and method of use of such compositions
US8143360B2 · kind B2 · utility
2Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2005 |
| Grant date | Mar 27, 2012 |
| Priority date | — |
| Expiry date | Jan 23, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention is a composition comprising a curable arylcyclobutene based oligomer or polymer and a dissolution inhibitor which comprises a compound comprising at least two diazonaphthoquinone (DNQ) moieties each of which is pendant from different phenyl groups.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.