Method of depositing protective structures

US8143594B2 · kind B2 · utility

Inventors

• Heinz Wanzenboeck · Wien, AT
• Wolfram Buehler · Karlsruhe, DE
• Holger Doemer · Bopfingen, DE
• Carl Kuebler · Aalen, DE
• Daniel Fischer · Furth, DE
• Gottfried Hochleitner · Wien, AT
• Emmerich Bertagnolli · Munich, DE

Key dates

• Filing date: Feb 5, 2010
• Grant date: Mar 27, 2012
• Expiry date: Jun 26, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31749
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate, and a second phase of electron beam assisted deposition of the protective strip on the activated surface area portion from the gas phase.