Pick-and-place module for test handlers
US8146969B2 · kind B2 · utility
2Cited by
5References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 2010 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | May 20, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pick-and-place module for test handlers includes a main body, and a kit. The main body has N-th vacuum paths (where N is plural). The kit has M-th pickers. The M-th pickers are provided so as respectively correspond to M-th vacuum passages (where 1≦M≦N), which are formed to respectively correspond to all or some of the N-th vacuum paths formed in the main body, and holds semiconductor devices or releasing the held semiconductor devices using vacuum pressures. The kit is detachably mounted to the main body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.