Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device

US8147136B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Jörg Heber · Erfurt, DE
• Thomas Klose · Althengstett, DE
• Thilo Sandner · Dresden, DE
• Andreas Bergmann · Berlin, DE
• Christian Gerwig · Radebeul, DE
• Thomas Knieling · Dresden, DE

Key dates

• Filing date: Mar 31, 2008
• Grant date: Apr 3, 2012
• Expiry date: Jun 5, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/0808
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.