Reflective optical systems and their fabrication
US8147669B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2007 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Dec 21, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B17/0621
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for fabricating a reflective optical system is disclosed that includes providing first and second mandrels that form a mandrel assembly, and positioning the mandrel assembly in an electroforming bath. The process also includes performing an electroforming operation for a predetermined period, thereby forming an optical system on the mandrel assembly. The process further involves separating the mandrel assembly from the optical system. The resulting optical system is reflective and has at least first and second elongate hollow sections each having an axis corresponding to the axis of elongation of a respective mandrel. The reflective optical system may be used as an afocal relay and used in lithography applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.