Method of manufacturing gas sensor
US8147901B2 · kind B2 · utility
1Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 2007 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Jan 12, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/901
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the substrate to cover the electrodes, patterning the paste by a photolithography process, and reducing the metal-ligand complex included in the patterned paste.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.