Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
US8147924B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 2, 2008 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Nov 29, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.