Microengineered vacuum interface for an ionization system
US8148681B2 · kind B2 · utility
12Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2010 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Oct 11, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T408/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.