Amorphous transparent conductive film, target and production method for amorphous conductive film
US8153033B2 · kind B2 · utility
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Key dates
| Filing date | Mar 7, 2006 |
| Grant date | Apr 10, 2012 |
| Priority date | — |
| Expiry date | Mar 23, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/40
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An amorphous transparent conductive film containing as a main component a six oxygen-coordinated metal oxide, and satisfying, in a radial distribution function (RDF) obtained by an X-ray scattering measurement, a relationship of A/B>1, providing that the maximum value of RDF at an interatomic distance of from 0.30 nm to 0.36 nm is A and the maximum value of RDF at an interatomic distance of from 0.36 nm to 0.42 nm is B.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.