Patent · US Active

Polymer composition, hardmask composition having antireflective properties, and associated methods

US8153349B2 · kind B2 · utility

6Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 23, 2008
Grant dateApr 10, 2012
Priority date—
Expiry dateAug 7, 2030

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/091
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A polymer composition includes an aromatic ring-containing polymer represented by Formula 1:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.