Protection of cavities opening onto a face of a microstructured element
US8153503B2 · kind B2 · utility
0Cited by
33References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2007 |
| Grant date | Apr 10, 2012 |
| Priority date | — |
| Expiry date | Apr 3, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/053
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a method for protecting the interior of at least one cavity (4) having a portion of interest (5) and opening onto a face of a microstructured element (1), consisting of depositing, on said face, a nonconformal layer (6) of a protective material, in which said nonconformal layer closes off the cavity without covering the portion of interest.The invention also relates to a method for producing a device comprising such a microstructured element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.