Methods and apparatus for e-beam scanning
US8155272B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2008 |
| Grant date | Apr 10, 2012 |
| Priority date | — |
| Expiry date | Jul 27, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one aspect, an x-ray scanning device is provided. The x-ray scanning device comprises a target adapted to convert electron-beam (e-beam) energy into x-ray energy, a detector array positioned to detect at least some x-rays emitted from the target, and a conveyer mechanism adapted to convey items to be inspected through an inspection region formed by the target and the detector array, wherein the target and the detector array are rotated out of alignment with each other such that x-rays emitted from the target impinge on diametrically positioned detectors of the detector array without passing through near-side detectors of the detector array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.