Hybrid contact mode scanning cantilever system
US8156568B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2008 |
| Grant date | Apr 10, 2012 |
| Priority date | — |
| Expiry date | Jan 20, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/863
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention addresses a contact mode hybrid scanning system (HSS), which can be used for measuring topography. The system consists of a cantilever or a cantilever array, a scanning stage, a light source, and instrumentation to synchronize and control the individual components. Detection of the cantilever's movement is achieved by directly measuring the change in disposition of the cantilever including its height, rotation at one or more points on the cantilever thereby providing a partial three-dimensional reconstruction without the need for actuating the cantilever. This is achieved by employing a displacement meter such as a triangulation meter or a confocal meter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.