Microvalve device
US8156962B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 14, 2007 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | Apr 18, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86702
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microvalve device for controlling fluid flow includes a body defining a chamber having first and second ends. The first end is in communication with a source of command pressure. The second end in communication with a source of load pressure. A micromachined spool valve is disposed in the chamber between the first and second ends for sliding movement by differential pressure across the spool between a first position in which allows fluid flow between the source of load pressure and a source of supply pressure and a second position which allows fluid flow between the source of load pressure and a pressure vent. The spool valve has a closed position intermediate the first position and the second position which restricts fluid flow between the source of load pressure and both the source of supply pressure and the pressure vent. The spool valve is moveably connected to the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.