Patent · US Active

Method and loader apparatus for TEM machine work chamber device

US8157497B2 · kind B2 · utility

0Cited by
15References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 6, 2008
Grant dateApr 17, 2012
Priority date
Expiry dateFeb 16, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/5182
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the retracted position and the extended position. A lower closure for holding a part to be processed in the TEM machine is removably positioned in the hoop portion. A ram piston of the TEM machine is movable between a load position and a process position. When the ram piston moves from a load position to a process position the ram piston contacts the lower closure and extends through the hoop of the retractable arm to move the lower closure to the process position. A thermal chamber receives the lower closure when the ram piston moves to the process position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.