Analysis apparatus and analysis method of chlorosilanes
US8158072B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2009 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | Oct 22, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N31/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The problem to be solved is to provide an analysis apparatus and analysis method of chlorosilanes capable of stably carrying out an analysis with less contamination. An analysis apparatus of chlorosilanes includes a vaporizer 10 for vaporizing chlorosilanes L and an analyzer for analyzing materials r1 and r2 remained by vaporizing. In the analysis apparatus, the vaporizer 10 includes a hotplate 11, a cover 12 detachably attached onto the hotplate 11 and configuring a heating chamber 13 with the hotplate 11, and a sample vessel 14 arranged in the heating chamber 13 and having an opening upside capable of storing the chlorosilanes L. The cover 12 includes a supply port 12a for supplying an inert gas or nitrogen gas into the heating chamber 13 and a discharge port 12b for discharging gases in the heating chamber 13.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.