Apparatus for generating coarse-grained simulation image of sample to be measured with a probe of a scanning probe microscope
US8160848B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 29, 2007 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | May 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample atomic configuration creation part in a control section creates the atomic arrangement data of a sample, and a sample surface height calculation part calculates a sample surface height for every mesh. A probe profile creation part creates the atomic arrangement data of a probe, and a probe surface height calculation part calculates the height of the probe surface for every mesh. A probe scanning part supplies the coordinate of a scanning start position in the scanning range to a collision height specification part. The collision height specification part calculates the distance between the sample surface and the probe in each mesh. Calculation of this distance is repeated for all meshes of the probe at the coordinate of this measuring position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.